P84 High Performance Polyimide Polymer for Semiconductors | HP Polymers

 

P84HP Polyimide Parts for the Semiconductor Industry

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Features:

  • High Purity
  • Non- meltable
  • Dimensionally stable at elevated temperatures
  • Machinable into finished parts
  • Excellent wear resistance



Physical Properties

P84HP is a high purity polyimide specifically developed to meet the demanding needs of the chip manufacturing industry. P84 is a unique polyimide that can be fabricated into machined parts without the need for a secondary, post-curing step. The finished parts exhibit uniform imidization from the outer skin to the inner layers. The fully imidized material shows extremely good checmical resistance to various acids and plasma gases used in the processing of silicon wafers into integrated chips. Listed below are some of the important properties of P84 Polyimide.




Property ASTM
method
Unit Vespel SP1 P84HP
Mechanical      
Tensile Strength D-638 psi 12,500 20,000
Tensile Strength @ 500°F D-638 psi 6,000 10,150
Elongation D-638 % 7.5 9
Flex Strength D-790 psi 21,000 29,750
Flex Modulus S-790 psi 450,000 550,000
Compressive Strength @ 10% strain D-695 psi 19,300 34,800
Deformation @2000 psi - 24 hrs D-621 % 0.14 0.1
       
Other      
Coefficient of expansion TMA 10-6 in/in/F 30 27.8
Specific gravity     1.43 1.34
Hardness Shore D     88
Dielectric strength   V/mil 560 500
Surface resistivity   Ohms 1.00E+17-18 1.00E+17
Volume resistivity   Ohms/cm 1.00E+15-16 1.00E+18



Thermal Stability

The long term thermal stability of P84 is excellent. The flex strength of P84 remains high especially at elevated temperatures. Since P84 is an amorphus plastic, the dimensional stability at elevated temperatures is very good. P84 is a non-meltable polymer, therefore, it has excellent creep under load at high exposure temperatures. This fact allows the material to be used in critical etching processes where chamber temperatures are high.

Retention of Flex Strength under Exposure to Elevated Temperatures




Chemical Resistance

The fully imidized nature of P84 yields excellent chemical resistance to various solvents, acids, and hydraulic fluids. P84 polyimide is produced using novel isocyanate technology which yields a unique, fully imidized material without the need for curing.. Other polyimides must be molded and cured. The curing closes the imide rings and produces water as a by-product that migrates out through the surface. Fabricated parts made from P84 are non-porous, which minimizes the migration of fluids into the surface layers and greatly improves chemical resistance.

Lenzing P84 Polyimide Resin 100 hour exposure - Temperature: 68° F

Chemical Concentration (%) Weight Gain (%) Residual Elongation (%) Residual Strength (%)
H2O2 30 1.02 100 100
HCl 20 0.67 110 100
HCl conc. 0.13 70 100
HNO3 20 0.65 98 100
Acetic Acid 20 0.87 114 100
H2SO4 6N 0.54 50 87
NaOH 1N 1.79 120 100
NaOH 10 3.84 170 98
NaOH 6N 6.87 146 87
KOH 10 4.18 175 95



Vespel SP1 Polyimide

Chemical Concentration (%) Tempearture (F) Exposure (Hr) Residual Strength (%)
HNO3 70 73 120 40
Acetic Acid 15 210 1,900 20
HCl 5 73 120 70
HCl conc. 73 120 70
NaOH 5 73 120 55



Lenzing P84 Polyimide Resin Chemical Resistance List after 1000 hour exposure at room temperature

Chemical Weight Gain (%) Residual Elongation (%) Residual Strength (%)
Antifreeze 1.37 90 92
Brake Fluid 1.64 90 98
Diesel 0.08 108 99
Gasoline (unleaded) 0.05 98 100
Hydraulic Fluid 0.33 99 96
Jet Fuel JP5 0.10 105 100
Jet Fuel JP4 0.05 104 100
Motor Oil -0.40 98 99
Thermal Conduction Oil -0.04 82 92
Skydrol 500B -0.90 109 100
Acetone -0.07 111 100
Freon TF -0.13 94 99
Ethylacetate -0.85 105 100
Isopropanol -1.41 107 100
Methylethylketone -1.16 112 100
Perchloroethylene -0.11 96 98
Benzene -0.10 90 93
Toluene -0.16 104 100
Xylene -0.10 95 98
Bleaching Agent (Clorox) 1.25 78 90
Dish Washing Detergent (Joy) 2.32 105 99
Deionized Water (100C/212F) 1.65 42 65
Coolant Liquid (120C/248F) -1.44 63 86



Wear Resistance

P84 Polyimide exhibits excellent sliding and wear resistance especially at elevated temperatures. Typical fillers such as graphite powder provides P84 with very low wear rates which is useful in bushing and bearing applications.

Tribological Comparison of VESPEL and P84 Formulations